General Information
Version
6
Revision date
2025-12-22
Product name
Hexamethyldisilazane
Product Synonyms
HMDS
CAS No.
999-97-3
Emergency telephone
1-800-234-7437, 001-800-227-6701, +32 14 57 52 11, 001-201-796-7100, +32 14 57 52 99, 001-800-424-9300, 001-703-527-3887
Icons in SDS
Company Information
company name
Fisher Scientific
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
WHMIS 2015 Classification
Signal word
Danger Hazard Statements Highly flammable liquid and vapor Toxic in contact with skin Harmful if swallowed or if inhaled
Prevention
Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking Keep container tightly closed Ground and bond container and receiving equipment Use explosion-proof electrical/ventilating/lighting/equipment Avoid breathing dust/fume/gas/mist/vapors/spray Wash face, hands and any exposed skin thoroughly after handling Do not eat, drink or smoke when using this product Use only outdoors or in a well-ventilated area Wear protective gloves/protective clothing/eye protection/face protection Use non-sparking tools Take action to prevent static discharges
Response
IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water or shower IF INHALED: Remove person to fresh air and keep comfortable for breathing Call a POISON CENTER/ doctor if you feel unwell Rinse mouth Wash contaminated clothing before reuse In case of fire: Use dry sand, dry chemical or alcohol-resistant foam to extinguish
Storage
Store locked up Store in a well-ventilated place. Keep cool
Disposal
Dispose of contents/container to an approved waste disposal plant
2.3 Other hazards
Harmful to aquatic life with long lasting effects
2.1 Classification of the substance or mixture
WHMIS 2015 Classification This product is hazardous in accordance with the Canada Hazardous Products Act (HPA) and Hazardous Products Regulation (HPR), as amended (SOR/2022-272) Flammable liquids Category 2 Acute oral toxicity Category 4 Acute dermal toxicity Category 3 Acute Inhalation Toxicity