General Information
Revision date
2009-10-20
Product name
Hexamethyldisilazane
Product Synonyms
hexamethyldisilazane
CAS No.
999-97-3
supplier name
Thermo Fisher Scientific
Manufacturer Name
Thermo Fisher Scientific
Icons in SDS
Company Information
company name
Thermo Fisher Scientific
Section 2
SECTION 2: Hazards identification
Directive 67/548/EEC: Physical state : Liquid. [Clear sparkling liquid.] Odor : Ammoniacal.
Principle Routes of Exposure
Dermal contact. Eye contact. Inhalation. Ingestion.
Potential Acute Health Effects
Inhalation : May give off gas, vapor or dust that is very irritating or corrosive to the respiratory system. Exposure to decomposition products may cause a health hazard. Serious effects may be delayed following exposure. Ingestion : Harmful if swallowed. May cause burns to mouth, throat and stomach. Skin : Corrosive to the skin. Causes burns. Toxic in contact with skin. Eyes : Corrosive to eyes. Causes burns. Potential chronic health effects
Potential chronic health
Can cause target organ damage. Carcinogenicity : No known significant effects or critical hazards. Mutagenicity : No known significant effects or critical hazards.
Teratogenic Effects
No known significant effects or critical hazards. Developmental effects : No known significant effects or critical hazards. Fertility effects : No known significant effects or critical hazards. Target organs : Causes damage to the following organs: the nervous system, skin, eyes, eye, lens or cornea. May cause damage to the following organs: lungs, cardiovascular system, immune system, central nervous system (CNS). Over-exposure signs/symptoms Inhalation : No specific data. Ingestion : Adverse symptoms may include the following: stomach pains Skin : Adverse symptoms may include the following: pain or irritation redness blistering may occur Eyes : Adverse symptoms may include the following: pain watering redness Medical conditions aggravated by over- exposure : Pre-existing skin and digestive disorders and disorders involving any other target organs mentioned in this MSDS as being at risk may be aggravated by over-exposure to this product. The substance is classified as dangerous according to Directive 67/548/EEC and its amendments.
2.1 Classification of the substance or mixture
F; R11 R18 Xn; R20/21/22 C; R34 Xi; R36
Other physicochemical hazards
Highly flammable. In use, may form flammable/explosive vapor-air mixture.
Health hazards
Harmful by inhalation, in contact with skin and if swallowed. Causes burns. Irritating to eyes. See toxicological information (section 11)