General Information
Revision date
2004-07-16
Product name
SILANE (5 PPM TO 15%) IN NITROGEN, HELIUM OR ARGON
Product Synonyms
Silicon Tetrahydride in Nitrogen, Helium or Argon
Chemical name
Silicon Tetrahydride in Nitrogen, Helium or Argon
Emergency telephone
(800) 424-9300
Icons in SDS
Company Information
company name
The BOC Group, Inc
Section 2
SECTION 2: Hazards identification
OSHA EXPOSURE LIMITS1: INGREDIENT % VOLUME PEL-OSHA2 TLV-ACGIH3 LD50 or LC50 Route/Species Nitrogen 0 to 99.9995 None Established Simple Asphyxiant Not Available FORMULA: N2 CAS: 7727-37-9 RTECS #: QW9700000 Helium 0 to 99.9995 None Established Simple Asphyxiant Not Available FORMULA: He CAS: 7440-59-7 RTECS #: MH6520000 Argon 0 to 99.9995 None Established Simple Asphyxiant Not Available FORMULA: Ar CAS: 7440-37-1 RTECS #: CF2300000 Silane 0.0005 to 15.0 Not Available 5 ppm TWA LC50: 19000 ppm FORMULA: SiH4 (ISO, CGA P-20) CAS: 7803-62-5 RTECS #: W1400000
