General Information
Revision date
2021-08-05
Product name
TEMAZ
Substance name
Tetrakis(ethylmethylamido)zirconium
Product Synonyms
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Chemical name
organometallic
CAS No.
175923-04-3
1.2.1 Relevant identified uses
semiconductor manufacture
1.2.2. Uses advised against
R&D Use Only
supplier name
Tetra Tech International, Inc
Emergency telephone
+1-703-527-3887
Icons in SDS
Company Information
company name
Tetra Tech International, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
reach@tetratech.com, Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H225, H261, H314, H335
Hazard statements
Code
Statements
H225
Highly Flammable liquid and vapour
Section 2
SECTION 2: Hazards identification
According to Regulation (EC) No. 1272/2008 (CLP) Classification of the substance or mixture
Signal word
Danger
Hazard statements
H225 Highly flammable liquid and vapor. H261 In contact with water releases flammable gases. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation.
Prevention
P210 Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking. P240 Ground/Bond container and receiving equipment. P233 Keep container tightly closed. P241 Use explosion-proof electrical/ventilating/lighting equipment. P243 Take action to prevent static discharges. P242 Use non-sparking tools. P223 Do not allow contact with water. P231+P232 Handle and store contents under inert gas. Protect from moisture. P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P271 Use only outdoors or in a well-ventilated area.
Response
P370+P378 In case of fire: Use appropriate media to extinguish. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P321 Specific treatment (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P302+P335+P334 IF ON SKIN: Brush off loose particles from skin. Immerse in cool water [or wrap in wet bandages]. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
P403+P233 Store in a well-ventilated place. Keep container tightly closed. P402+P404 Store in a dry place. Store in a closed container. P235 Keep cool. P405 Store locked up.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Reacts violently with water.
2.1 Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008 [CLP] Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system )