Note: Ingredients listed on restricted chemical lists
EC/CAS
107-21-1
Name of the chemical
Ethane-1,2-diol
Concentration
N/A
EC/CAS
205-634-3
Name of the chemical
Oxalic acid, its esters and alkaline salts
Concentration
N/A
EC/CAS
235-185-9
Name of the chemical
Ammonium fluoride
Concentration
N/A
General Information
Revision date
2019-09-18
Product name
SG100X4a
1.2.1 Relevant identified uses
semiconductor manufacture
supplier name
Tetra Tech International, Inc
Emergency telephone
+1-703-527-3887 (24 hours) - CHEMTREC – International
Icons in SDS
Company Information
company name
Tetra Tech International, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
reach@tetratech.com, Product.stewardship@entegris.com
GHS Information
Signal word
Warning
Hazard Codes
Hazard statements (CLP)
H315, H319, H373
Hazard statements
Code
Statements
H315
Causes skin irritation
Section 2
CLP CLASSIFICATION
Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2 Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( kidneys )
2.2 Label elements
Labeling according to Regulation (EC) No. 1272/2008 [CLP]
Signal word
Warning
Hazard statements
H315 Causes skin irritation. H319 Causes serious eye irritation. H373 May cause damage to organs through prolonged or repeated exposure. （kidneys ）
Prevention
P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves and eye/face protection.
Response
P314 Get medical advice/attention if you feel unwell. P302+P352 IF ON SKIN: Wash with plenty of soap and water. P332+P313 If skin irritation occurs: Get medical advice/attention. P362+P364 Take off contaminated clothing and wash before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention.
Storage
None needed according to classification criteria.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
