Silicon Nitride Support Film

SECTION 2: Hazards identification

Emergency Overview: These products are manufactured under cleanroom conditions and are effectively in solid form as received. The silicon nitride membrane is 50 to 200 nanometers in scale and can be fractured if handled without due care, potentially releasing a small number of microscopic particles in the vicinity of the user that may act as an irritant. The silicon dioxide is sandwiched between the silicon substrate and the silicon nitride membrane and therefore not directly exposed to the user. Whilst not the intended application of these products, if they are ground to a powder, the dust created in the process can be irritating.

Principle Routes of Exposure

Eyes, skin, ingestion and inhalation

Potential health effects

Eyes: May cause eye irritation if placed in direct contact Skin: May cause skin irritation if placed in direct contact Ingestion: May be harmful, effects not known Inhalation: Unless ground to a powder or heated to a high temperature, exposure to the products by inhalation is not known to cause any deleterious health effects. Accidental fracture of the membrane by the user could generate microscopic particles that may cause irritation to the upper respiratory tract. These products are exposed to temperatures > 1050oC during manufacture and therefore it is unlikely that the user will be exposed to volatile compounds unless heating the products to temperatures approaching the melting point or boiling point of the materials.

Acute Health Hazards

No data available

Health hazards

Carcinogenic effects: No data available Mutagenic effects: No data available

Teratogenic Effects

No data available Developmental toxicity: No data available

Medical Conditions Generally Aggravated by Exposure

Repeated or prolonged exposure is not known to aggravate any medical condition.