Microprime HP Primer

Shin-Etsu MicroSi, Inc

Revision date : 2000-01-03

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Health risk rating 1
Safety risk rating 1
Environmental risk rating 1

General Information

Revision date

2000-01-03

Product name

Microprime HP Primer

Chemical name

Hexamethyldisilazane

CAS No.

999-97-3

supplier name

Shin-Etsu MicroSi, Inc

Manufacturer Name

Shin-Etsu Chemical Co. Ltd

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Company Information

company name

Shin-Etsu MicroSi, Inc

Section 2

2.1 Classification of the substance or mixture

Flammable Liquid (IMO and DOT) SUBSIDIARY HAZARD CLASSIFICATION: Corrosive FIRE AND EXPLOSION: Flammable and Explosive Hazard

NFPA Ratings

Component Health(Blue) Flammability(Red) Reactivity(Yellow) Special(White) Hexamethyldisilazane (HMDS) 1 3 1 --

Potential health effects

INHALATION: May cause nausea, headache and vomiting. SKIN CONTACT: May causes severe irritation and chemical burns. EYE CONTACT: Severe irritation and possible chemical burns. INGESTION: Possible nausea, headache, vomiting, abdominal pain. 1 of 6

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