General Information
Revision date
2000-01-03
Product name
Microprime HP Primer
Chemical name
Hexamethyldisilazane
CAS No.
999-97-3
supplier name
Shin-Etsu MicroSi, Inc
Manufacturer Name
Shin-Etsu Chemical Co. Ltd
Icons in SDS
Company Information
company name
Shin-Etsu MicroSi, Inc
Section 2
2.1 Classification of the substance or mixture
Flammable Liquid (IMO and DOT) SUBSIDIARY HAZARD CLASSIFICATION: Corrosive FIRE AND EXPLOSION: Flammable and Explosive Hazard
NFPA Ratings
Component Health(Blue) Flammability(Red) Reactivity(Yellow) Special(White) Hexamethyldisilazane (HMDS) 1 3 1 --
Potential health effects
INHALATION: May cause nausea, headache and vomiting. SKIN CONTACT: May causes severe irritation and chemical burns. EYE CONTACT: Severe irritation and possible chemical burns. INGESTION: Possible nausea, headache, vomiting, abdominal pain. 1 of 6