General Information
Product name
srPR-7126M-20
Chemical name
Resist Compon€nt
1.2.1 Relevant identified uses
This ploduci is limited to use as a Photor€sisi in semiconductor photomicrolithography
supplier name
Shin-Eisu Microsi, Inc
Manufacturer Name
Shin-Etsu Chenical Co.. Ltd
Emergency telephone
(800) 424-9300
Icons in SDS
Company Information
company name
Shin-Etsu Chenical Co.. Ltd
Section 2
SECTION 2: Hazards identification
2.1 Classification of the substance or mixture
Flanmable Liquid (based on IMO and DOT) FIRE AND EXPLOSION Flammable and Explosive Hazard
NFPA Ratings
He3lth Propyleneglycolnono- I merhylerhemcelat€ (PGMEA) 2 Flanmability R€activiry Special 0 POTENTIAL HEALTH EIIECTS INGESTIONI INTLALATION Larse ool doses may produce gdho-intestinal disturbances. Malerial is Causes initation to th€ respiratory tract. Symptoms nay include coughing, shortness ofbreath.-High concedrations have a ndcotic effect. Cd cause diziness and lighfi€adedness. May caus€ central nesous system depression and unconsciousness. SKIN CONTACT: EYE CONTACT May cause skin iritalion. prclonged skin cont.cl may cduse dematitis. Causes severe eye irilllion. *lixktsuniem9. ?artNo. SIPR ?126M-20 on Ingredients
