General Information
Revision date
2015-11-04
Product name
MP-98
1.2.1 Relevant identified uses
This product is limited to use in Semiconductor photolithography processes
supplier name
Shin-Etsu MicroSi, Inc
Manufacturer Name
Shin-Etsu Chemical Co., Ltd
Emergency telephone
(800) 424-9300
Icons in SDS
Company Information
company name
Shin-Etsu Chemical Co., Ltd
e-mail address of the competent person responsible for the Safety Data Sheet
csteam@microsi.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Hazard categories
Flammable Liquid -- Category 2 Acute Toxicity Oral -- Category 4 Acute Toxicity Dermal -- Category 4 Acute Toxicity Inhalation -- Category 4 Skin corrosion/irritation -- Category 1 Eye damage/irritation -- Category 1 Hazardous to the Aquatic Environment –Long Term (Chronic) Hazard -- Category 3
Signal word
Danger
Hazard statements
H225 Highly Flammable liquid and vapor H302 Harmful if swallowed H312 Harmful in contact with skin H314 Causes severe skin burns and eye damage H318 Causes serious eye damage H332 Harmful if inhaled H412 Harmful to aquatic life with long lasting effects
Prevention
P210 Keep away from heat/sparks/open flames/hot surfaces. – NO smoking. P233 Keep container tightly closed. P240 Ground/bond container and receiving equipment. P241 Use explosion proof electrical/ventilating/lighting equipment. P242 Use only non sparking tools. P243 Take precautionary measures against static discharge. P260 Do not breathe dust/fume/gas/mist/vapors/spray. P262 Do not get in eyes, on skin, or on clothing. P264 Wash hands thoroughly after handling. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. P273 Avoid release to the environment. P280 Wear protective gloves/protective clothing/eye protection/face protection.
Response
P301+P312 IF SWALLOWED: Call a POISON Center or doctor if you feel unwell. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. P302+P352 IF ON SKIN: wash with plenty of soap and water. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P304 + P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P312 Call a POISON Center or doctor if you feel unwell. P363 Wash contaminated clothing before reuse. P370+P378 In case of fire, use Foam, dry chemical, or carbon dioxide. Do NOT use Water.
Storage
P403+P233 Store in a well ventilated place. Keep container tightly closed. P403+P235 Store in a well ventilated place. Keep cool. P405 Store locked up.
Disposal
P501 Waste from Residues and Unused Products: Recommend waste material is disposed of by using incineration. Follow the waste disposal requirements of your country, state, or local authorities.
2.3 Other hazards
HMDS reacts with water to emit ammonia gas
2.1 Classification of the substance or mixture
Flammable Liquid (based on IATA, IMDG and DOT) FIRE AND EXPLOSION: Liberates Explosive vapors with air.
NFPA Ratings
Component Health (Blue) Flammability (Red) Reactivity (Yellow) Special (White) MP-98