MP-90

Shin-Etsu Chemical Co., Ltd

Revision date : 2015-11-04

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GHS02 GHS05 GHS07
Health risk rating 5
Safety risk rating 5
Environmental risk rating 5

General Information

Revision date

2015-11-04

Product name

MP-90

1.2.1 Relevant identified uses

This product is limited to use in Semiconductor photolithography processes

supplier name

Shin-Etsu MicroSi, Inc

Manufacturer Name

Shin-Etsu Chemical Co., Ltd

Emergency telephone

(800) 424-9300

Icons in SDS

GHS02 GHS05 GHS07

Company Information

company name

Shin-Etsu Chemical Co., Ltd

e-mail address of the competent person responsible for the Safety Data Sheet

csteam@microsi.com

GHS Information

Signal word

Danger

Section 2

SECTION 2: Hazards identification

Hazard categories

Flammable Liquid -- Category 2 Acute Toxicity Oral -- Category 4 Acute Toxicity Dermal -- Category 4 Acute Toxicity Inhalation -- Category 4 Skin corrosion/irritation -- Category 1 Eye damage/irritation -- Category 1 Hazardous to the Aquatic Environment –Long Term (Chronic) Hazard -- Category 3

Signal word

Danger

Hazard statements

H225 Highly Flammable liquid and vapor H302 Harmful if swallowed H312 Harmful in contact with skin H314 Causes severe skin burns and eye damage H318 Causes serious eye damage H332 Harmful if inhaled H412 Harmful to aquatic life with long lasting effects

Prevention

P210 Keep away from heat/sparks/open flames/hot surfaces. – NO smoking. P233 Keep container tightly closed. P240 Ground/bond container and receiving equipment. P241 Use explosion proof electrical/ventilating/lighting equipment. P242 Use only non sparking tools. P243 Take precautionary measures against static discharge. P260 Do not breathe dust/fume/gas/mist/vapors/spray. P262 Do not get in eyes, on skin, or on clothing. P264 Wash hands thoroughly after handling. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. P273 Avoid release to the environment. P280 Wear protective gloves/protective clothing/eye protection/face protection.

Response

P301+P312 IF SWALLOWED: Call a POISON Center or doctor if you feel unwell. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. P302+P352 IF ON SKIN: wash with plenty of soap and water. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P304 + P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P312 Call a POISON Center or doctor if you feel unwell. P363 Wash contaminated clothing before reuse. P370+P378 In case of fire, use Foam, dry chemical, or carbon dioxide. Do NOT use Water.

Storage

P403+P233 Store in a well ventilated place. Keep container tightly closed. P403+P235 Store in a well ventilated place. Keep cool. P405 Store locked up.

Disposal

P501 Waste from Residues and Unused Products: Recommend waste material is disposed of by using incineration. Follow the waste disposal requirements of your country, state, or local authorities.

2.3 Other hazards

HMDS reacts with water to emit ammonia gas

2.1 Classification of the substance or mixture

Flammable Liquid (based on IATA, IMDG and DOT) FIRE AND EXPLOSION: Liberates Explosive vapors with air.

NFPA Ratings

Component Health (Blue) Flammability (Red) Reactivity (Yellow) Special (White) MP-90

SDS Library

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Up-to-date – Your SDS get updated to latest versions.
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Employee access – Tablets, Smartphones, or link from Corporate Intranet
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Safety – One-click access to first aid information.
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Labels – Generate Secondary Container Labels with just one click.