Note: Ingredients listed on restricted chemical lists
EC/CAS
7631-86-9
Name of the chemical
Silver adsorbed on silicon dioxide
Concentration
>=10.0-<=20.0%
EC/CAS
7732-18-5
Name of the chemical
Water, distilled, conductivity or of similar purity H2O
Concentration
>=75.0-<=90.0%
General Information
Revision date
2023-11-12
Product name
ACuPLANE 5900-(100-199) SLURRY
1.2.1 Relevant identified uses
This product is intended to be used in a wetted state only. It is to be used only in polishing semiconductor wafers in closed systems, and not sprayed or aerosolized. Liquid spills should be cleaned up quickly to avoid drying of the material and deposition of solid residue
1.2.2. Uses advised against
We recommend that you use this product in a manner consistent with the listed use. If your intended use is not consistent with the stated use, please contact your sales or technical service representative
Emergency telephone
1-800-424-9300, 800-424-9300
Icons in SDS
Company Information
company name
Rohm and Haas Electronic Materials CMP
e-mail address of the competent person responsible for the Safety Data Sheet
SDSQuestion-NA@dupont.com
Section 2
SECTION 2: Hazards identification
2.1 Classification of the substance or mixture
GHS classification in accordance with
2.3 Other hazards
No data available