Note: Ingredients listed on restricted chemical lists
EC/CAS
202-625-6/97-99-4
Name of the chemical
Tetrahydrofurfuryl alcohol
Concentration
1-5% 0-1%
General Information
Version
1,06
Revision date
2019-03-14
Product name
LOR C Series Resists
1.2.1 Relevant identified uses
Photoresist Product Categories [PC] 30: Photochemical
supplier name
micro resist technology GmbH
Manufacturer Name
MicroChem Corporation
Emergency telephone
+1 703 527 3887
Icons in SDS
Company Information
company name
MicroChem Corporation
e-mail address of the competent person responsible for the Safety Data Sheet
productsafety@microchem.com, safety@microresist.de
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H226, H302+H332, H315, H319, H336, H360Df
Hazard statements
Code
Statements
H226
Flammable liquid and vapour
Section 2
SECTION 2: Hazards identification
Hazard categories
Flammable liquid: Flam. Liq. 3 Acute toxicity: Acute Tox. 4 Skin corrosion/irritation: Skin Irrit. 2 Serious eye damage/eye irritation: Eye Irrit. 2 Reproductive toxicity: Repr. 1B Specific target organ toxicity - single exposure: STOT SE 3
Hazard statements
Flammable liquid and vapour. Harmful if inhaled. Harmful if swallowed. Causes skin irritation. Causes serious eye irritation. May damage the unborn child. Suspected of damaging fertility. May cause drowsiness or dizziness. H226 Flammable liquid and vapour. H302+H332 Harmful if swallowed or if inhaled. H315 Causes skin irritation. H319 Causes serious eye irritation. H336 May cause drowsiness or dizziness. H360Df May damage the unborn child. Suspected of damaging fertility.
Hazardous Ingredients
cyclopentanone gamma-butyrolactone tetrahydro-2-furylmethanol; tetrahydrofurfuryl alcohol proprietary Dye B
Signal word
Danger
Precautionary statements
P210 Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking. P261 Avoid breathing dust/fume/gas/mist/vapours/spray. P280 Wear protective gloves/protective clothing/eye protection/face protection. P301+P310 IF SWALLOWED: Immediately call a POISON CENTER. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P304+P341 IF INHALED: If breathing is difficult, remove victim to fresh air and keep at rest in a position comfortable for breathing. P333+P313 If skin irritation or rash occurs: Get medical advice/attention. P337+P313 If eye irritation persists: Get medical advice/attention. P370+P378 In case of fire: Use sand, extinguishing powder or alcohol-resistant foam to extinguish. P302+P352 IF ON SKIN: Wash with plenty of soap and water. P403+P235 Store in a well-ventilated place. Keep cool. P501 Dispose of contents/container to an appropriate recycling or disposal facility.
Special rules for supplemental label elements for certain mixtures
20 - < 25 % of the mixture consists of ingredient(s) of unknown acute toxicity (inhalation).
Contains
20 - < 25 % of components with unknown hazards to the aquatic environment
Results of PBT and vPvB assessment
not applicable
