General Information
Revision date
2016-11-25
Product name
mr-EBL 6000 Negative Photoresist Series for Electron Beam Lithography
1.2.1 Relevant identified uses
Photoresist Product Categories [PC]: Photosensitive agent and other photochemicals
Icons in SDS
Company Information
company name
micro resist technology GmbH
e-mail address of the competent person responsible for the Safety Data Sheet
safety@microresist.de
GHS Information
Signal word
Warning
Hazard Codes
Hazard statements (CLP)
H226, H315, H317, H319, H412
Hazard statements
Code
Statements
H226
Flammable liquid and vapour
Section 2
2.1 Classification of the substance or mixture
Regulation (EC) No. 1272/2008
Hazard categories
Flammable liquid: Flam. Liq. 3 Skin corrosion/irritation: Skin Irrit. 2 Serious eye damage/eye irritation: Eye Irrit. 2 Respiratory or skin sensitisation: Skin Sens. 1 Hazardous to the aquatic environment: Aquatic Chronic 3
Hazard statements
Flammable liquid and vapour. Causes skin irritation. Causes serious eye irritation. May cause an allergic skin reaction. Harmful to aquatic life with long lasting effects. H226 Flammable liquid and vapour. H315 Causes skin irritation. H319 Causes serious eye irritation. H317 May cause an allergic skin reaction. H412 Harmful to aquatic life with long lasting effects.
2.2 Label elements
Regulation (EC) No. 1272/2008
Hazardous Ingredients
Anisole propylene carbonate Mixture of triarylsulfonium hexafluoroantimonate salts
Signal word
Warning
Precautionary statements
P210 Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking. P233 Keep container tightly closed. P240 Ground/bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take precautionary measures against static discharge. P261 Avoid breathing dust/fume/gas/mist/vapours/spray. P272 Contaminated work clothing should not be allowed out of the workplace. P280 Wear protective gloves/protective clothing/eye protection/face protection. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P333+P313 If skin irritation or rash occurs: Get medical advice/attention. P352 Wash with plenty of water. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention. P403+P235 Store in a well-ventilated place. Keep cool.
2.3 Other hazards
No data available
