Note: Ingredients listed on restricted chemical lists
EC/CAS
97-99-4
Name of the chemical
Tetrahydrofurfuryl alcohol
Concentration
1-5% <1%
General Information
Revision date
2023-02-05
Product name
LOR C Series Resists
1.2.1 Relevant identified uses
Photoresist
Emergency telephone
800-424-9300, 703-527-3887
Icons in SDS
Company Information
company name
Kayaku Advanced Materials, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
productsafety@kayakuam.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H226, H315, H318, H336, H360
Hazard statements
Code
Statements
H226
Flammable liquid and vapour
Section 2
SECTION 2: Hazards identification
2.1 Classification of the substance or mixture
GHS02 Flame Flammable Liquids 3 H226 Flammable liquid and vapor. GHS08 Health hazard Toxic to Reproduction 1B H360 May damage fertility or the unborn child. GHS05 Corrosion Eye Damage 1 H318 Causes serious eye damage. GHS07 Skin Irritation 2 H315 Causes skin irritation. Specific Target Organ Toxicity - Single Exposure 3 H336 May cause drowsiness or dizziness.
2.2 Label elements
The product is classified and labeled according to the Globally Harmonized System (GHS) (Contd. of page 1)
Hazard pictograms
GHS02 GHS05 GHS07 GHS08
Signal word
Danger
Hazardous Ingredients
gamma-Butyrolactone Tetrahydrofurfuryl alcohol
Hazard statements
H226 Flammable liquid and vapor. H315 Causes skin irritation. H318 Causes serious eye damage. H360 May damage fertility or the unborn child. H336 May cause drowsiness or dizziness.
Precautionary statements
P201 Obtain special instructions before use. P261 Avoid breathing dust/fume/gas/mist/vapors/spray P280 Wear protective gloves/protective clothing/eye protection/face protection. P301+P310 If swallowed: Immediately call a poison center/doctor. P302+P352 If on skin: Wash with plenty of soap and water. P304+P341 If inhaled: If breathing is difficult, remove person to fresh air and keep comfortable for breathing. P305+P351+P338 If in eyes: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P332+P313 If skin irritation occurs: Get medical advice/attention. P337+P313 If eye irritation persists: Get medical advice/attention. P370+P378 In case of fire Use to extinguish Alcohol resistant foam, Fire-extinguishing powder, Carbon dioxide. P403+P235 Store in a well-ventilated place. Keep cool. P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
Classification system
ꞏ NFPA ratings (scale 0 - 4) Health = 3 3 Fire = 3 3 0 Reactivity = 0 ꞏ HMIS-ratings (scale 0 - 4) HEALTH *3 Health = *3 FIRE 3 Fire = 3 REACTIVITY 0 Reactivity = 0
PBT Substances
Not applicable (Contd. of page 2)
vPvB Substances
Not applicable
