General Information
Revision date
2021-09-06
Product name
4MS
Product Synonyms
TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749; C4H12Si
Chemical name
silanes
CAS No.
75-76-3
1.2.1 Relevant identified uses
Semiconductors
supplier name
한국 인테그리스 주식회사 (Hanguk Entegris Co., Ltd.)
Icons in SDS
Company Information
company name
한국 인테그리스 주식회사 (Hanguk Entegris Co., Ltd.)
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H224, H411
Hazard statements
Code
Statements
H224
Extremely flammable liquid and vapour
H411
Toxic to aquatic life with long lasting effects
Section 2
SECTION 2: Hazards identification
Hazard/Risk Classification Flammable Liquids - Category 1 Hazardous to the Aquatic Environment - Chronic - Category 2
Signal word
Danger. Hazard/Risk Statement H224 Extremely flammable liquid and vapor. H411 Toxic to aquatic life with long lasting effects.
Prevention
P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P233 Keep container tightly closed. P240 Ground/Bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take precautionary measures against static discharge. P280 Wear protective gloves and eye/face protection. P273 Avoid release to the environment.
Response
P370+P378 In case of fire: Use appropriate media to extinguish. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P391 Collect spillage.
Storage
P403 Store in a well-ventilated place. P235 Keep cool.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations (depending on the information set out in the Waste Control Act).
Other hazards which do not result in classification
None known.
