General Information
Revision date
2021-06-02
Product name
SiCl4
Product Synonyms
SILICON CHLORIDE; TETRACHLOROSILANE; SILICON TETRACHLORIDE; TETRACHLOROSILICON; PERCHLOROSILANE; SILICON CHLORIDE (SiCl4); SILICON(IV) CHLORIDE; UN 1818; Cl4Si
Chemical name
Halogenated Silane
CAS No.
10026-04-7
1.2.1 Relevant identified uses
semiconductor manufacture
supplier name
Entegris Singapore Pte. Ltd
Emergency telephone
800-101-2201 (CHEMTREC Toll Free in country
Icons in SDS
Company Information
company name
Entegris Singapore Pte. Ltd
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H290, H301, H314, H331, H371
Hazard statements
Code
Statements
H290
May be corrosive to metals
Section 2
SECTION 2: Hazards identification
Singapore Standard SS 586-2:2014 Corrosive to Metals - Category 1 Acute Toxicity - Oral - Category 3 Acute Toxicity - Inhalation - Vapor - Category 3 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 2 ( respiratory system )
Signal word
Danger
Hazard statements
H290 May be corrosive to metals. H331 Toxic if inhaled. H301 Toxic if swallowed. H314 Causes severe skin burns and eye damage. H371 May cause damage to organs. （respiratory system ）
Prevention
P234 Keep only in original container. P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area.
Response
P390 Absorb spillage to prevent material damage. P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P321 Specific treatment (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
P406 Store in corrosive resistant container with a resistant inner liner. P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
Other hazards which do not result in classification
Reacts violently with water.
