General Information
Revision date
2021-01-21
Product name
4MS
Product Synonyms
TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749; C4H12Si
Chemical name
silanes
CAS No.
75-76-3
1.2.1 Relevant identified uses
semiconductor manufacture
supplier name
Entegris Singapore Pte. Ltd
Icons in SDS
Company Information
company name
Entegris Singapore Pte. Ltd
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H224, H411
Hazard statements
Code
Statements
H224
Extremely flammable liquid and vapour
Section 2
SECTION 2: Hazards identification
Singapore Standard SS 586-2:2014 Flammable Liquids - Category 1 Hazardous to the Aquatic Environment - Chronic - Category 2
Signal word
Danger
Hazard statements
H224 Extremely flammable liquid and vapor. H411 Toxic to aquatic life with long lasting effects.
Prevention
P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P233 Keep container tightly closed. P240 Ground/Bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take precautionary measures against static discharge. P280 Wear protective gloves and eye/face protection. P273 Avoid release to the environment.
Response
P370+P378 In case of fire: Use appropriate media to extinguish. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P391 Collect spillage.
Storage
P403+P235 Store in a well-ventilated place. Keep cool.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
Other hazards which do not result in classification
None known.
