Note: Ingredients listed on restricted chemical lists
EC/CAS
3030-47-5
Name of the chemical
Bis(2-dimethylaminoethyl)(methyl)amine
Concentration
10-20
General Information
Revision date
2021-04-29
Product name
Zr15-SG10
1.2.1 Relevant identified uses
semiconductor manufacture
1.2.2. Uses advised against
This product is manufactured under LVE L-03-0130
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor. Toxic in contact with skin. Causes severe skin burns and eye damage. May cause respiratory irritation. May cause drowsiness or dizziness. Very toxic to aquatic life with long lasting effects.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Use only outdoors or in a well-ventilated area. Avoid release to the environment.
Response
In case of fire, use media appropriate for extinction. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Collect spillage.
Storage
Store in a well-ventilated place. Keep cool. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Dermal 52.1% of the mixture consists of ingredient(s) of unknown acute toxicity. Statement(s) of Unknown Aquatic Toxicity 17.8% of the mixture consists of ingredient(s) of unknown acute aquatic toxicity. 7.2% of the mixture consists of ingredient(s) of unknown chronic aquatic toxicity.
2.3 Other hazards
None known.
