Note: Ingredients listed on restricted chemical lists
EC/CAS
7440-63-3
Name of the chemical
Xenon Xe
Concentration
98.49-99.95
General Information
Revision date
2019-02-07
Product name
Xenon and Hydrogen Mixture A
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Extremely flammable gas. Contains gas under pressure; may explode if heated. Harmful if inhaled. May cause drowsiness or dizziness. May displace oxygen and cause rapid suffocation.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Use only outdoors or in a well-ventilated area. Avoid breathing gas.
Response
Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Call a POISON CENTER or doctor if you feel unwell.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up. Protect from sunlight.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Inhalation 98.49% of the mixture consists of ingredient(s) of unknown acute toxicity.
2.3 Other hazards
Contact with liquified gas may cause frostbite.
