General Information
Revision date
2019-12-17
Product name
TMDSO
Product Synonyms
1,1,3,3-TETRAMETHYLDISILOXANE
Chemical name
silicone/siloxane
CAS No.
3277-26-7
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
OSHA HCS Classification
Flammable Liquids - Category 2
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Wear protective gloves/protective clothing/eye protection/face protection.
Response
In case of fire: Use appropriate media to extinguish. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower.
Storage
Store in a well-ventilated place. Keep cool.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
