Note: Ingredients listed on restricted chemical lists
EC/CAS
16961-83-4
Name of the chemical
Hexafluorosilicic acid
Concentration
90-99 1-10
General Information
Revision date
2021-06-04
Product name
TK10-X1
CAS No.
16961-83-4
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Causes severe skin burns and eye damage. May cause damage to organs. May cause damage to organs through prolonged or repeated exposure.
Prevention
Wear protective gloves and eye/face protection. Do not breathe vapor or mist. Wash thoroughly after handling. Do not eat, drink or smoke when using this product.
Response
IF exposed or concerned: Get medical advice/attention. Immediately call a POISON CENTER or doctor. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Remove/take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Specific treatment is urgent, see first aid section of Safety Data Sheet.
Storage
Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
