General Information
Revision date
2020-07-31
Product name
EnrichedPlus GeF4, Hydrogen Mixture
1.2.1 Relevant identified uses
semi-conductor fabrication, general synthetic chemical
1.2.2. Uses advised against
This product is manufactured under (LVE) Low Volume Exemption number (L-07-0005) and may only be used in a semiconductor process
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Extremely flammable gas. Contains gas under pressure; may explode if heated. May displace oxygen and cause rapid suffocation. Fatal if inhaled. Causes severe skin burns and eye damage. May cause harm to breast-fed children. Causes damage to organs. （respiratory system ） Causes damage to organs through prolonged or repeated exposure. （kidneys , skeletal system ）
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Avoid contact during pregnancy/while nursing. Do not eat, drink or smoke when using this product. Obtain special instructions before use. Use only outdoors or in a well-ventilated area.
Response
Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. If exposed: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
Storage
Store in a well-ventilated place. Protect from sunlight. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
May react on contact with water. May cause frostbite upon sudden release of liquefied gas. One of the components is an asphyxiant, consider oxygen.
