Note: Ingredients listed on restricted chemical lists
EC/CAS
78-40-0
Name of the chemical
Phosphoric acid, triethyl ester, TEP
Concentration
N/A
General Information
Revision date
2018-12-10
Product name
TEPO
Product Synonyms
TRIETHYL PHOSPHATE; PHOSPHORIC ACID, TRIETHYL ESTER; ETHYL PHOSPHATE; TEP; C6H15O4P
CAS No.
78-40-0
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Warning
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Warning
Hazard statements
Harmful if swallowed. Causes serious eye irritation. Suspected of damaging fertility or the unborn child. May cause damage to organs. (nervous system ) May cause drowsiness or dizziness.
Prevention
Do not breathe vapor or mist. Wear protective gloves/protective clothing/eye protection/face protection. Wash thoroughly after handling. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood.
Response
If exposed or concerned: Call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Call a POISON CENTER or doctor/physician if you feel unwell. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention. IF SWALLOWED: Call a POISON CENTER or doctor/physician if you feel unwell. Rinse mouth.
Storage
Store locked up. Store in a well-ventilated place. Keep container tightly closed.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
