Note: Ingredients listed on restricted chemical lists
General Information
Revision date
2018-09-17
Product name
TEOS
Chemical name
esters, carboxylic, aliphatic, silicon
CAS No.
78-10-4
1.2.1 Relevant identified uses
semiconductor manufacture, analytical chemical/synthetic chemical
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H226, H315, H319, H335, H336, H370, H372, H373
Hazard statements
Code
Statements
H226
Flammable liquid and vapour
Section 2
2.1 Classification of the substance or mixture
Flammable Liquids - Category 3 Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2A Specific target organ toxicity - Single exposure - Category 1 ( blood ) Specific target organ toxicity - Single exposure - Category 3 ( respiratory system , central nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( kidneys )
Signal word
Danger
Hazard statements
H226 Flammable liquid and vapor. H315 Causes skin irritation. H319 Causes serious eye irritation. H370 Causes damage to organs. (blood ) H335 May cause respiratory irritation. H336 May cause drowsiness or dizziness. H372 Causes damage to organs through prolonged or repeated exposure. (respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (kidneys )
Prevention
P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P233 Keep container tightly closed. P240 Ground/Bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take precautionary measures against static discharge. P260 Do not breathe vapor or mist. P264 Wash hands thoroughly after handling. P271 Use only outdoors or in a well-ventilated area. P280 Wear protective gloves and eye/face protection. P270 Do not eat, drink or smoke when using this product.
Response
P370+P378 In case of fire: Use appropriate media for extinction. P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P312 Call a POISON CENTER or doctor/physician if you feel unwell. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P332+P313 If skin irritation occurs: Get medical advice/attention. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention.
Storage
P403 Store in a well-ventilated place. P235 Keep cool. P233 Keep container tightly closed. P405 Store locked up.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.