TEOS

Entegris, Inc

Revision date : 2018-09-17

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GHS02 GHS07 GHS08
Health risk rating 5
Safety risk rating 2
Environmental risk rating 1

Note: Ingredients listed on restricted chemical lists

EC/CAS

78-10-4

Name of the chemical

Tetraethyl orthosilicate

Concentration

N/A

Listed in

General Information

Revision date

2018-09-17

Product name

TEOS

Chemical name

esters, carboxylic, aliphatic, silicon

CAS No.

78-10-4

1.2.1 Relevant identified uses

semiconductor manufacture, analytical chemical/synthetic chemical

Icons in SDS

GHS02 GHS07 GHS08

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Hazard Codes

Hazard statements (CLP)

H226, H315, H319, H335, H336, H370, H372, H373

Hazard statements

Code

Statements

H226

Flammable liquid and vapour

Section 2

2.1 Classification of the substance or mixture

Flammable Liquids - Category 3 Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2A Specific target organ toxicity - Single exposure - Category 1 ( blood ) Specific target organ toxicity - Single exposure - Category 3 ( respiratory system , central nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( kidneys )

Signal word

Danger

Hazard statements

H226 Flammable liquid and vapor. H315 Causes skin irritation. H319 Causes serious eye irritation. H370 Causes damage to organs. (blood ) H335 May cause respiratory irritation. H336 May cause drowsiness or dizziness. H372 Causes damage to organs through prolonged or repeated exposure. (respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (kidneys )

Prevention

P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P233 Keep container tightly closed. P240 Ground/Bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take precautionary measures against static discharge. P260 Do not breathe vapor or mist. P264 Wash hands thoroughly after handling. P271 Use only outdoors or in a well-ventilated area. P280 Wear protective gloves and eye/face protection. P270 Do not eat, drink or smoke when using this product.

Response

P370+P378 In case of fire: Use appropriate media for extinction. P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P312 Call a POISON CENTER or doctor/physician if you feel unwell. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P332+P313 If skin irritation occurs: Get medical advice/attention. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention.

Storage

P403 Store in a well-ventilated place. P235 Keep cool. P233 Keep container tightly closed. P405 Store locked up.

Disposal

P501 Dispose of contents/container in accordance with local/regional/national/international regulations.

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Safety – One-click access to first aid information.
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Labels – Generate Secondary Container Labels with just one click.