TEMAZ

Entegris, Inc

Revision date : 2021-08-05

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GHS02 GHS05
Health risk rating 3
Safety risk rating 2
Environmental risk rating 1

General Information

Revision date

2021-08-05

Product name

TEMAZ

Product Synonyms

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

Chemical name

organometallic

CAS No.

175923-04-3

1.2.1 Relevant identified uses

semiconductor manufacture

Emergency telephone

Canada - 1-703-741-5971

Icons in SDS

GHS02 GHS05

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Section 2

SECTION 2: Hazards identification

Classification in accordance with Schedule 1 of Hazardous Products Regulations (HPR) (SOR/2015-17) Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 2

Physical hazards

Not Otherwise Classified - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1

Health hazards

Not Otherwise Classified - Category 1

Signal word

Danger

Hazard statements

Highly flammable liquid and vapor. In contact with water releases flammable gases. Causes severe skin burns and eye damage. Reacts violently with water. May cause burns to the respiratory tract.

Prevention

Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Handle and store contents under inert gas. Protect from moisture. Do not allow contact with water. Use explosion-proof electrical/ventilating/lighting equipment. Take action to prevent static discharges. Use non-sparking tools. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection.

Response

In case of fire: Use appropriate media to extinguish. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment (see label). IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. IF ON SKIN: Brush off loose particles from skin and immerse in cool water. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.

Storage

Store in a dry place. Store in a closed container. Store in a well-ventilated place. Keep cool. Store locked up.

Disposal

Dispose of contents/container in accordance with local/regional/national/international regulations.

2.3 Other hazards

None known.

SDS Library

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