General Information
Revision date
2021-08-05
Product name
TEMAZ
Product Synonyms
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Chemical name
organometallic
CAS No.
175923-04-3
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
Canada - 1-703-741-5971
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with Schedule 1 of Hazardous Products Regulations (HPR) (SOR/2015-17) Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 2
Physical hazards
Not Otherwise Classified - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1
Health hazards
Not Otherwise Classified - Category 1
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor. In contact with water releases flammable gases. Causes severe skin burns and eye damage. Reacts violently with water. May cause burns to the respiratory tract.
Prevention
Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Handle and store contents under inert gas. Protect from moisture. Do not allow contact with water. Use explosion-proof electrical/ventilating/lighting equipment. Take action to prevent static discharges. Use non-sparking tools. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection.
Response
In case of fire: Use appropriate media to extinguish. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment (see label). IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. IF ON SKIN: Brush off loose particles from skin and immerse in cool water. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a dry place. Store in a closed container. Store in a well-ventilated place. Keep cool. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.