TEMAZ

Entegris, Inc

Revision date : 2021-02-04

SDS Library

Move your SDS library online today

Check Icon
Setup – Easy setup with our database of 16 million+ SDSs
Check Icon
Up-to-date – Your SDS get updated to latest versions.
Check Icon
Employee access – Tablets, Smartphones, or link from Corporate Intranet
Check Icon
Safety – One-click access to first aid information.
Check Icon
Labels – Generate Secondary Container Labels with just one click.
GHS02 GHS05 GHS07 GHS08
Health risk rating 5
Safety risk rating 5
Environmental risk rating 5

General Information

Revision date

2021-02-04

Product name

TEMAZ

Product Synonyms

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

Chemical name

organometallic

CAS No.

175923-04-3

1.2.1 Relevant identified uses

semiconductor manufacture

1.2.2. Uses advised against

This product is manufactured under (LVE) Low Volume Exemption number (L-18-0308)

Icons in SDS

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Section 2

OSHA HCS Classification

Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system )

Signal word

Danger

Hazard statements

Highly flammable liquid and vapor. In contact with water releases flammable gases. Causes severe skin burns and eye damage. May cause respiratory irritation.

Prevention

Keep away from heat/sparks/open flame/hot surfaces - No smoking. Ground/Bond container and receiving equipment. Keep container tightly closed. Use explosion-proof electrical/ventilating/lighting equipment. Take precautionary measures against static discharge. Use only non-sparking tools. Do not allow contact with water. Handle under inert gas. Protect from moisture. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Use only outdoors or in a well-ventilated area.

Response

In case of fire: Use appropriate media to extinguish. Brush off loose particles from skin. Immerse in cool water/wrap in wet bandages. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.

Storage

Store in a well-ventilated place. Keep container tightly closed. Store in a dry place. Keep cool. Store locked up.

Disposal

Dispose of contents/container in accordance with local/regional/national/international regulations.

2.3 Other hazards

Reacts violently with water.

SDS Library

Move your SDS library online today

Check Icon
Setup – Easy setup with our database of 16 million+ SDSs
Check Icon
Up-to-date – Your SDS get updated to latest versions.
Check Icon
Employee access – Tablets, Smartphones, or link from Corporate Intranet
Check Icon
Safety – One-click access to first aid information.
Check Icon
Labels – Generate Secondary Container Labels with just one click.