General Information
Revision date
2021-02-04
Product name
TEMAZ
Product Synonyms
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Chemical name
organometallic
CAS No.
175923-04-3
1.2.1 Relevant identified uses
semiconductor manufacture
1.2.2. Uses advised against
This product is manufactured under (LVE) Low Volume Exemption number (L-18-0308)
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
OSHA HCS Classification
Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system )
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor. In contact with water releases flammable gases. Causes severe skin burns and eye damage. May cause respiratory irritation.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Ground/Bond container and receiving equipment. Keep container tightly closed. Use explosion-proof electrical/ventilating/lighting equipment. Take precautionary measures against static discharge. Use only non-sparking tools. Do not allow contact with water. Handle under inert gas. Protect from moisture. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Use only outdoors or in a well-ventilated area.
Response
In case of fire: Use appropriate media to extinguish. Brush off loose particles from skin. Immerse in cool water/wrap in wet bandages. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store in a dry place. Keep cool. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Reacts violently with water.