TEMAH

Entegris, Inc

Revision date : 2020-07-01

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GHS02 GHS05 GHS07 GHS08
Health risk rating 1
Safety risk rating 1
Environmental risk rating 1

General Information

Revision date

2020-07-01

Product name

TEMAH

Product Synonyms

TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM; C12H32HfN4

Chemical name

organometallic

CAS No.

352535-01-4

1.2.1 Relevant identified uses

semiconductor manufacture

Emergency telephone

U.S. - 1-800-424-9300

Icons in SDS

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Section 2

OSHA HCS Classification

Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system , central nervous system )

Signal word

Danger

Hazard statements

Highly flammable liquid and vapor. In contact with water releases flammable gases. Causes severe skin burns and eye damage. May cause respiratory irritation. May cause drowsiness or dizziness.

Prevention

Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not allow contact with water. Handle under inert gas. Protect from moisture. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Do not breathe vapor or mist. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Wear protective gloves/protective clothing/eye protection/face protection.

Response

In case of fire, use media appropriate for extinction. Brush off loose particles from skin and immerse in cool water/wrap in wet bandages. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.

Storage

Store in a well-ventilated place. Keep cool. Store in a dry place. Store in a closed container. Keep container tightly closed. Store locked up.

Disposal

Dispose of contents/container in accordance with local/regional/national/international regulations.

2.3 Other hazards

None known.

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