General Information
Revision date
2020-07-01
Product name
TEMAH
Product Synonyms
TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM; C12H32HfN4
Chemical name
organometallic
CAS No.
352535-01-4
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
OSHA HCS Classification
Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system , central nervous system )
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor. In contact with water releases flammable gases. Causes severe skin burns and eye damage. May cause respiratory irritation. May cause drowsiness or dizziness.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not allow contact with water. Handle under inert gas. Protect from moisture. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Do not breathe vapor or mist. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Wear protective gloves/protective clothing/eye protection/face protection.
Response
In case of fire, use media appropriate for extinction. Brush off loose particles from skin and immerse in cool water/wrap in wet bandages. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a well-ventilated place. Keep cool. Store in a dry place. Store in a closed container. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.