General Information
Revision date
2018-09-26
Product name
TDMAHf
Product Synonyms
Tetrakis(dimethylamido)hafnium(IV)
Chemical name
organometallic
CAS No.
19782-68-4
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Flammable solid. In contact with water releases flammable gases. Causes severe skin burns and eye damage. May cause respiratory irritation.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Handle under inert gas. Protect from moisture. Do not allow contact with water. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Do not breathe dust. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Use only outdoors or in a well-ventilated area.
Response
In case of fire: Use appropriate media to extinguish. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Brush off loose particles from skin. Immerse in cool water/wrap in wet bandages. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a dry place. Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Reacts violently with water.