General Information
Revision date
2021-09-16
Product name
TDEAZ
Product Synonyms
Tetrakis(diethylamido)zirconium(IV)
Chemical name
organometallic
CAS No.
13801-49-5
1.2.1 Relevant identified uses
semiconductor manufacture
1.2.2. Uses advised against
Material for use only in TSCA exempt applications: Substances used for research and development,
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor. In contact with water releases flammable gases. Causes skin irritation. Causes serious eye irritation. May cause respiratory irritation.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Ground/Bond container and receiving equipment. Keep container tightly closed. Use explosion-proof electrical/ventilating/lighting equipment. Take precautionary measures against static discharge. Use only non-sparking tools. Do not allow contact with water. Handle under inert gas. Protect from moisture. Avoid breathing vapor or mist. Wash thoroughly after handling. Wear protective gloves and eye/face protection. Use only outdoors or in a well-ventilated area.
Response
In case of fire: Use appropriate media to extinguish. Brush off loose particles from skin. Immerse in cool water/wrap in wet bandages. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Call a POISON CENTER or doctor/physician if you feel unwell. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. If skin irritation occurs: Get medical advice/attention. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store in a dry place. Keep cool. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Reacts violently with water.
