General Information
Revision date
2018-04-05
Product name
TaCl5
Product Synonyms
Tantalum Chloride (TaCl5); Pentachlorotantalum; Tantalum Chloride; Tantalum Pentachloride; Tantalum
Chemical name
metal halides
CAS No.
7721-01-9
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
OSHA HCS Classification
Combustible Dust Acute Toxicity - Oral - Category 4 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 1 ( lungs )
Signal word
Danger
Hazard statements
May form combustible dust concentrations in air. Harmful if swallowed. Causes severe skin burns and eye damage. Causes damage to organs. (lungs )
Prevention
Do not breathe dust. Wear protective gloves/protective clothing/eye protection/face protection. Wash thoroughly after handling. Do not eat, drink or smoke when using this product.
Response
If exposed: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
