Note: Ingredients listed on restricted chemical lists
EC/CAS
102-71-6
Name of the chemical
triethanolamine
Concentration
10-57 30-40
EC/CAS
3030-47-5
Name of the chemical
Bis(2-dimethylaminoethyl)(methyl)amine
Concentration
10-20
EC/CAS
7664-39-3
Name of the chemical
Hydrofluoric acid, its normal salts, its complexes and hydrofluorides with the exception of those given in Annex III
Concentration
1-10
EC/CAS
1336-21-6
Name of the chemical
ammonium hydroxide
Concentration
1-10
General Information
Revision date
2019-02-22
Product name
ST-250; 晶圓清洗劑
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
+1-800-394-4083, +1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H302, H312, H315, H317, H319, H333, H351, H370, H372, H373, H412
Hazard statements
Code
Statements
H302
Harmful if swallowed
Section 2
SECTION 2: Hazards identification
2.1 Classification of the substance or mixture
Acute Toxicity - Oral - Category 4 Acute Toxicity - Dermal - Category 4 Acute Toxicity - Inhalation - Dust/Mist - Category 5 Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2A Skin Sensitization - Category 1 Carcinogenicity - Category 2 Specific Target Organ Toxicity - Single Exposure - Category 1 ( central nervous system , respiratory system , heart ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( liver , kidneys , respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( skeletal system , teeth ) Hazardous to the Aquatic Environment - Acute - Category 3 Hazardous to the Aquatic Environment - Chronic - Category 3
Signal word
Danger
Hazard statements
H302 Harmful if swallowed. H312 Harmful in contact with skin. H333 May be harmful if inhaled. H315 Causes skin irritation. H319 Causes serious eye irritation. H317 May cause an allergic skin reaction. H351 Suspected of causing cancer. H370 Causes damage to organs. (central nervous system , respiratory system , heart ) H372 Causes damage to organs through prolonged or repeated exposure. (liver , kidneys , respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (skeletal system , teeth ) H412 Harmful to aquatic life with long lasting effects.
Prevention
P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P272 Contaminated work clothing should not be allowed out of the workplace. P270 Do not eat, drink or smoke when using this product. P201 Obtain special instructions before use. P202 Do not handle until all safety precautions have been read and understood. P273 Avoid release to the environment.
Response
P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P312 Call a POISON CENTER or doctor if you feel unwell. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P302+P352 IF ON SKIN: Wash with plenty of soap and water. P333+P313 If skin irritation or rash occurs: Get medical advice/attention. P362+P364 Take off contaminated clothing and wash before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention. P301+P330 IF SWALLOWED: rinse mouth.
Storage
P405 Store locked up.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Dermal 13% of the mixture consists of ingredient(s) of unknown acute toxicity. Oral 3.9% of the mixture consists of ingredient(s) of unknown acute toxicity. Inhalation 52.7% of the mixture consists of ingredient(s) of unknown acute toxicity. Statement(s) of Unknown Aquatic Toxicity 59% of the mixture consists of ingredient(s) of unknown acute aquatic toxicity. 59% of the mixture consists of ingredient(s) of unknown chronic aquatic toxicity.
Other hazards which do not result in classification
None known.