General Information
Revision date
2021-08-13
Product name
SP-1000
1.2.1 Relevant identified uses
Polishing compound for semiconductor substrates
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Causes serious eye irritation. May cause respiratory irritation. Causes damage to organs through prolonged or repeated exposure. （respiratory system , immune system , kidneys ）
Prevention
Do not breathe vapor or mist. Wash thoroughly after handling. Wear eye protection/face protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area.
Response
Get medical advice/attention if you feel unwell. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Call a POISON CENTER or doctor/physician if you feel unwell. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
