General Information
Revision date
2018-09-12
Product name
SILICON TETRAFLUORIDE
Product Synonyms
TETRAFLUOROSILANE
Chemical name
inorganic fluoride
CAS No.
7783-61-1
1.2.1 Relevant identified uses
semi-conductor fabrication, general synthetic chemical
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Contains gas under pressure; may explode if heated. Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. (metabolic system ) May cause respiratory irritation. Causes damage to organs through prolonged or repeated exposure. (teeth , skeletal system )
Prevention
Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area.
Response
If exposed: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
May cause frostbite upon sudden release of liquefied gas.
