General Information
Revision date
2021-05-13
Product name
SiCl4
Product Synonyms
SILICON CHLORIDE; TETRACHLOROSILANE; SILICON TETRACHLORIDE; TETRACHLOROSILICON; PERCHLOROSILANE; SILICON CHLORIDE (SiCl4); SILICON(IV) CHLORIDE; UN 1818; Cl4Si
CAS No.
10026-04-7
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
May be corrosive to metals. Toxic if inhaled. Toxic if swallowed. Causes severe skin burns and eye damage. May cause damage to organs. （respiratory system ）
Prevention
Keep only in original container. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area.
Response
Absorb spillage to prevent material damage. If exposed or concerned: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in corrosive resistant container with a resistant inner liner. Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Reacts violently with water.
