Note: Ingredients listed on restricted chemical lists
EC/CAS
112-34-5
Name of the chemical
2-(2-butoxyethoxy)ethanol
Concentration
50-60 20-30
EC/CAS
7664-39-3
Name of the chemical
Hydrofluoric acid, its normal salts, its complexes and hydrofluorides with the exception of those given in Annex III
Concentration
20-30
EC/CAS
126-33-0
Name of the chemical
Tetrahydrothiophene 1,1-dioxide
Concentration
1-10
General Information
Revision date
2021-06-15
Product name
RegenSi 31
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Fatal if inhaled. Fatal if swallowed. Fatal in contact with skin. Causes severe skin burns and eye damage. May cause allergy or asthma symptoms or breathing difficulties if inhaled. May cause an allergic skin reaction. Suspected of causing genetic defects. Suspected of damaging fertility or the unborn child. Causes damage to organs. （respiratory system , cardiovascular system , lungs , heart ） May cause drowsiness or dizziness. Causes damage to organs through prolonged or repeated exposure. （respiratory system , liver , nervous system ） May cause damage to organs through prolonged or repeated exposure. （kidneys ）
Prevention
Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Do not get in eyes, on skin, or on clothing. Contaminated work clothing must not be allowed out of the workplace. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood.
Response
If exposed: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. If experiencing respiratory symptoms: Call a POISON CENTER or doctor/physician. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. If skin irritation or rash occurs: Get medical advice/attention. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Inhalation 57.5% of the mixture consists of ingredient(s) of unknown acute toxicity.
2.3 Other hazards
None known.
