Note: Ingredients listed on restricted chemical lists
EC/CAS
3030-47-5
Name of the chemical
Bis(2-dimethylaminoethyl)(methyl)amine
Concentration
1-10
General Information
Revision date
2021-10-05
Product name
PZTG-3103
1.2.1 Relevant identified uses
Semiconductor Process
1.2.2. Uses advised against
Material is to only be used for Semiconductor Process. Prevent release to environment and exposure to personnel by operating in closed loop systems or properly contained equipment and processes. Use appropriate PPE when handling material (safety glasses, safety shoes, glove box, fume hood). Handle waste in closed containers. Send waste for offsite incineration or to POTW. Read and follow precautions in this Safety Data Sheet. This product is manufactured under LVE L-03-0128, L-03-0129, L-03-0130
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Aspiration hazard
Category 1 Acute Toxicity - Dermal - Category 3 Acute Toxicity - Inhalation - Vapor - Category 3 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Carcinogenicity - Category 1B Reproductive Toxicity - Category 1A Specific target organ toxicity - Single exposure - Category 3 ( respiratory system , central nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( nervous system , kidneys ) Hazardous to the Aquatic Environment - Acute - Category 1 Hazardous to the Aquatic Environment - Chronic - Category 1
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor. May be fatal if swallowed and enters airways. Toxic if inhaled. Toxic in contact with skin. Causes severe skin burns and eye damage. May cause cancer. May damage fertility or the unborn child. May cause respiratory irritation. May cause drowsiness or dizziness. Causes damage to organs through prolonged or repeated exposure. （nervous system , kidneys ） Very toxic to aquatic life with long lasting effects.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Avoid release to the environment.
Response
In case of fire, use media appropriate for extinction. IF exposed or concerned: Get medical advice/attention. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Collect spillage.
Storage
Store in a well-ventilated place. Keep cool. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Dermal 91.33% of the mixture consists of ingredient(s) of unknown acute toxicity. Inhalation 91.33% of the mixture consists of ingredient(s) of unknown acute toxicity. Statement(s) of Unknown Aquatic Toxicity 32.77% of the mixture consists of ingredient(s) of unknown acute aquatic toxicity. 24.1% of the mixture consists of ingredient(s) of unknown chronic aquatic toxicity.
2.3 Other hazards
None known.
