Note: Ingredients listed on restricted chemical lists
EC/CAS
7664-38-2
Name of the chemical
phosphoric acid
Concentration
80-90 10-20
EC/CAS
7664-39-3
Name of the chemical
Hydrofluoric acid, its normal salts, its complexes and hydrofluorides with the exception of those given in Annex III
Concentration
0-5
General Information
Revision date
2019-01-22
Product name
PlanarEx 2110
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Toxic if inhaled. Harmful if swallowed. Causes severe skin burns and eye damage. Causes damage to organs. (respiratory system ) Harmful to aquatic life.
Prevention
Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Avoid release to the environment.
Response
If exposed: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Aquatic Toxicity 0.4% of the mixture consists of ingredient(s) of unknown acute aquatic toxicity.
2.3 Other hazards
None known.
