Note: Ingredients listed on restricted chemical lists
EC/CAS
7664-38-2
Name of the chemical
phosphoric acid
Concentration
80-90 10-20
EC/CAS
7664-39-3
Name of the chemical
Hydrofluoric acid, its normal salts, its complexes and hydrofluorides with the exception of those given in Annex III
Concentration
0-5
General Information
Revision date
2018-03-08
Product name
PlanarEx 2100
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
+1-800-394-4083, +1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H302, H313, H314, H331, H370
Hazard statements
Code
Statements
H302
Harmful if swallowed
Section 2
SECTION 2: Hazards identification
2.1 Classification of the substance or mixture
Acute Toxicity - Oral - Category 4 Acute Toxicity - Dermal - Category 5 Acute Toxicity - Inhalation - Dust/Mist - Category 3 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system )
Signal word
Danger
Hazard statements
H331 Toxic if inhaled. H302 Harmful if swallowed. H313 May be harmful in contact with skin. H314 Causes severe skin burns and eye damage. H370 Causes damage to organs. (respiratory system )
Prevention
P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P271 Use only outdoors or in a well-ventilated area. P270 Do not eat, drink or smoke when using this product.
Response
P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P321 Specific treatment (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
Other hazards which do not result in classification
None known.
