NOE Etch

Entegris, Inc

Revision date : 2018-01-24

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GHS05 GHS08
Health risk rating 5
Safety risk rating 1
Environmental risk rating 1

Note: Ingredients listed on restricted chemical lists

EC/CAS

107-21-1

Name of the chemical

Ethane-1,2-diol

Concentration

90-100 -230 -230

EC/CAS

12125-01-8

Name of the chemical

Ammonium fluoride

Concentration

-311 -311

Listed in

General Information

Revision date

2018-01-24

Product name

NOE Etch

1.2.1 Relevant identified uses

semiconductor manufacture

Icons in SDS

GHS05 GHS08

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Hazard Codes

Hazard statements (CLP)

H315, H318, H370, H372, H373

Hazard statements

Code

Statements

H315

Causes skin irritation

Section 2

SECTION 2: Hazards identification

2.1 Classification of the substance or mixture

Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 1 ( central nervous system , heart , kidneys , respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( central nervous system , heart , respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( bones , teeth )

Signal word

Danger

Hazard statements

H315 Causes skin irritation. H318 Causes serious eye damage. H370 Causes damage to organs. (central nervous system , heart , kidneys , respiratory system ) H372 Causes damage to organs through prolonged or repeated exposure. (central nervous system , heart , respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (bones , teeth )

Prevention

P260 Do not breathe vapor or mist. P264 Wash hands thoroughly after handling. P270 Do not eat, drink or smoke when using this product. P280 Wear protective gloves and eye/face protection.

Response

P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P302+P352 IF ON SKIN: Wash with plenty of soap and water. P332+P313 If skin irritation occurs: Get medical advice/attention. P362+P364 Take off contaminated clothing and wash before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P310 Immediately call a POISON CENTER or doctor/physician.

Storage

P405 Store locked up.

Disposal

P501 Dispose of contents/container in accordance with local/regional/national/international regulations.

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