General Information
Revision date
2019-02-06
Product name
MOF-5
Product Synonyms
Tris[μ-[1,4-benzenedicarboxylato(2-)-κO1:κO"1]]-μ4-oxotetrazinc; Zn4O(1,4-benzodicarboxylate)3; Zn4O(BDC)3 ; zinc oxo-terephthalate; IRMOF-1; Basolite Z 100H
CAS No.
255367-66-9
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Flammable solid. Harmful in contact with skin. Harmful if inhaled. Causes serious eye irritation. May damage fertility or the unborn child.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Avoid breathing dust. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Use only outdoors or in a well-ventilated area. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood.
Response
In case of fire: Use appropriate media to extinguish. IF exposed or concerned: Get medical advice/attention. Call a POISON CENTER or doctor if you feel unwell. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN: Wash with plenty of soap and water. Take off contaminated clothing and wash before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.
Storage
Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
