General Information
Revision date
2021-01-20
Product name
JATO
Product Synonyms
inorganic
Chemical name
inorganic
1.2.1 Relevant identified uses
semiconductor manufacture
1.2.2. Uses advised against
This product is manufactured under (LVE) Low Volume Exemption number L-19-0193 and may only be used in a semiconductor process
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
OSHA HCS Classification
Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system )
Signal word
Danger
Hazard statements
Causes severe skin burns and eye damage. May cause respiratory irritation.
Prevention
Do not breathe dust. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Use only outdoors or in a well-ventilated area.
Response
Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Hydrolyzes on contact with water to form hydrogen chloride. Incompatible with oxygen.
