Fluorine Scrubber; 氟洗滌器

Entegris, Inc

Revision date : 2021-11-01

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GHS07 GHS08
Health risk rating 5
Safety risk rating 1
Environmental risk rating 1

Note: Ingredients listed on restricted chemical lists

EC/CAS

1305-62-0

Name of the chemical

Calcium dihydroxide

Concentration

90-100

General Information

Revision date

2021-11-01

Product name

Fluorine Scrubber; 氟洗滌器

Chemical name

Fluorine Scrubber; 氟洗滌器

1.2.1 Relevant identified uses

Removal of halogenated gases from semiconductor manufacturing processes

Icons in SDS

GHS07 GHS08

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Hazard Codes

Hazard statements (CLP)

H313, H315, H319, H333, H370, H372

Hazard statements

Code

Statements

H313

May be harmful in contact with skin

Section 2

SECTION 2: Hazards identification

Chemical Hazard(s) Classification: Acute Toxicity - Dermal - Category 5 Acute Toxicity - Inhalation - Dust/Mist - Category 5 Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2A Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( respiratory system ) Label content:

Signal word

Danger

Hazard statements

H333 May be harmful if inhaled. H313 May be harmful in contact with skin. H315 Causes skin irritation. H319 Causes serious eye irritation. H370 Causes damage to organs. (respiratory system ) H372 Causes damage to organs through prolonged or repeated exposure. (respiratory system )

Prevention

P260 Do not breathe dust. P264 Wash thoroughly after handling. P280 Wear protective gloves and eye/face protection. P270 Do not eat, drink or smoke when using this product.

Response

P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P321 Specific treatment (see label). P304+P312 IF INHALED: Call a POISON CENTER or doctor/physician if you feel unwell. P302+P352 IF ON SKIN: Wash with plenty of soap and water. P332+P313 If skin irritation occurs: Get medical advice/attention. P362+P364 Take off contaminated clothing and wash before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention.

Storage

P405 Store locked up.

Disposal

P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Dermal 5% of the mixture consists of ingredient(s) of unknown acute toxicity. Inhalation 5% of the mixture consists of ingredient(s) of unknown acute toxicity.

2.3 Other hazards

In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous.

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