General Information
Revision date
2021-10-25
Product name
Fluorine Scrubber
1.2.1 Relevant identified uses
Removal of halogenated gases from semiconductor manufacturing processes
Emergency telephone
Numbers/Nombor Telefon Kecemasan
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H315, H319, H370, H373
Hazard statements
Code
Statements
H315
Causes skin irritation
Section 2
SECTION 2: Hazards identification
2.1 Classification of the substance or mixture
Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2 Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( respiratory system )
Signal word
Danger
Hazard statements
H315 Causes skin irritation. H319 Causes serious eye irritation. H370 Causes damage to organs. （respiratory system ） H373 May cause damage to organs through prolonged or repeated exposure. （respiratory system ）
Prevention
P260 Do not breathe dust. P280 Wear protective gloves and eye/face protection. P264 Wash thoroughly after handling. P270 Do not eat, drink or smoke when using this product.
Response
P307+P311 If exposed: Call a POISON CENTER or doctor/physician. P321 Specific treatment (see label). P302+P352 IF ON SKIN: Wash with plenty of soap and water. P332+P313 If skin irritation occurs: Get medical advice/attention. P362 Take off contaminated clothing and wash before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention.
Storage
P405 Store locked up.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
Other hazards which do not result in classification
In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous.
