General Information
Revision date
2020-07-23
Product name
EnrichedPlus 72 Germanium Tetrafluoride, adsorbed
Product Synonyms
GERMANE TETRAFLUORIDE; GeF4; GERMANE FLUORIDE; TETRAFLUOROGERMANE
Chemical name
inorganic halogenated, gas
CAS No.
62566-74-9
1.2.1 Relevant identified uses
semiconductor fabrication, general synthetic chemical
1.2.2. Uses advised against
This product is manufactured under (LVE) Low Volume Exemption number (L-07-0005) and may only be used in a semiconductor process
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Fatal if inhaled. Causes severe skin burns and eye damage. May cause harm to breast-fed children. Causes damage to organs. （respiratory system ） Causes damage to organs through prolonged or repeated exposure. （kidneys , skeletal system ）
Prevention
Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Obtain special instructions before use. Avoid contact during pregnancy/while nursing. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area.
Response
If exposed: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
