Note: Ingredients listed on restricted chemical lists
EC/CAS
1344-28-1
Name of the chemical
aluminium oxide
Concentration
60-70 30-40
General Information
Revision date
2021-02-25
Product name
DM-3100
1.2.1 Relevant identified uses
Polishing compound for semiconductor substrates
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Suspected of causing genetic defects. Suspected of damaging fertility or the unborn child. May cause harm to breast-fed children. Causes damage to organs. （respiratory system ） Causes damage to organs through prolonged or repeated exposure. （nervous system , respiratory system , lungs ）
Prevention
Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Do not eat, drink or smoke when using this product. Avoid contact during pregnancy/while nursing. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood.
Response
IF exposed or concerned: Get medical advice/attention.
Storage
Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
