COF2/CO2/CO Mixture

Entegris, Inc

Revision date : 2021-02-03

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GHS02 GHS04 GHS06 GHS07 GHS08
Health risk rating 5
Safety risk rating 4
Environmental risk rating 5

Note: Ingredients listed on restricted chemical lists

EC/CAS

630-08-0

Name of the chemical

Kohlenmonoxid

Concentration

>71

EC/CAS

124-38-9

Name of the chemical

Carbon dioxide CO2

Concentration

<14

General Information

Revision date

2021-02-03

Product name

COF2/CO2/CO Mixture

1.2.1 Relevant identified uses

semiconductor manufacture

Emergency telephone

U.S. - 1-800-424-9300

Icons in SDS

GHS02 GHS04 GHS06 GHS07 GHS08 W001

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Section 2

SECTION 2: Hazards identification

Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of

Signal word

Danger

Hazard statements

Extremely flammable gas. Contains gas under pressure; may explode if heated. May displace oxygen and cause rapid suffocation. Toxic if inhaled. Causes skin irritation. Causes serious eye irritation. May damage fertility or the unborn child. Causes damage to organs. (circulatory system , nervous system , lung ) Causes damage to organs through prolonged or repeated exposure. (blood , cardiovascular system , respiratory system , reproductive system ) May cause damage to organs through prolonged or repeated exposure. (heart ) May cause long lasting harmful effects to aquatic life.

Prevention

Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Avoid release to the environment.

Response

Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. If exposed: Call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Call a POISON CENTER or doctor/physician if you feel unwell. IF ON SKIN: Wash with plenty of soap and water. If skin irritation occurs: Get medical advice/attention. Take off contaminated clothing and wash before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.

Storage

Store in a well-ventilated place. Keep container tightly closed. Store locked up. Protect from sunlight.

Disposal

Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Inhalation 8.89% of the mixture consists of ingredient(s) of unknown acute toxicity. Statement(s) of Unknown Aquatic Toxicity 9.94% of the mixture consists of ingredient(s) of unknown chronic aquatic toxicity.

2.3 Other hazards

Rapid release of compressed gas may cause frostbite. One of the components is an asphyxiant, consider oxygen.

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