Note: Ingredients listed on restricted chemical lists
EC/CAS
630-08-0
Name of the chemical
Kohlenmonoxid
Concentration
>71
EC/CAS
124-38-9
Name of the chemical
Carbon dioxide CO2
Concentration
<14
General Information
Revision date
2021-02-03
Product name
COF2/CO2/CO Mixture
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Extremely flammable gas. Contains gas under pressure; may explode if heated. May displace oxygen and cause rapid suffocation. Toxic if inhaled. Causes skin irritation. Causes serious eye irritation. May damage fertility or the unborn child. Causes damage to organs. (circulatory system , nervous system , lung ) Causes damage to organs through prolonged or repeated exposure. (blood , cardiovascular system , respiratory system , reproductive system ) May cause damage to organs through prolonged or repeated exposure. (heart ) May cause long lasting harmful effects to aquatic life.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Avoid release to the environment.
Response
Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. If exposed: Call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Call a POISON CENTER or doctor/physician if you feel unwell. IF ON SKIN: Wash with plenty of soap and water. If skin irritation occurs: Get medical advice/attention. Take off contaminated clothing and wash before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up. Protect from sunlight.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Inhalation 8.89% of the mixture consists of ingredient(s) of unknown acute toxicity. Statement(s) of Unknown Aquatic Toxicity 9.94% of the mixture consists of ingredient(s) of unknown chronic aquatic toxicity.
2.3 Other hazards
Rapid release of compressed gas may cause frostbite. One of the components is an asphyxiant, consider oxygen.