Note: Ingredients listed on restricted chemical lists
EC/CAS
630-08-0
Name of the chemical
Kohlenmonoxid
Concentration
89.6- -168 -168
EC/CAS
75-73-0
Name of the chemical
Tetrafluoro-methane
Concentration
0.3-8.6 -52, -52,
General Information
Revision date
2020-02-11
Product name
CO/CF4/H2 Mixture
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
+1-800-394-4083
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H220, H280, H331, H360, H370, H373
Hazard statements
Code
Statements
H220
Extremely flammable gas
Section 2
SECTION 2: Hazards identification
2.1 Classification of the substance or mixture
Flammable Gases - Category 1 Gases Under Pressure - Compressed gas Acute Toxicity - Inhalation - Gas - Category 3 (8.6% unknown ) Reproductive Toxicity - Category 1A Specific Target Organ Toxicity - Single Exposure - Category 1 ( circulatory system , nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( blood , heart )
Signal word
Danger
Hazard statements
H220 Extremely flammable gas. H280 Contains gas under pressure; may explode if heated. H331 Toxic if inhaled. H360 May damage fertility or the unborn child. H370 Causes damage to organs. （circulatory system , nervous system ） H373 May cause damage to organs through prolonged or repeated exposure. （blood , heart ）
Prevention
P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P260 Do not breathe gas. P264 Wash hands thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. P201 Obtain special instructions before use. P202 Do not handle until all safety precautions have been read and understood.
Response
P377 Leaking gas fire: Do not extinguish, unless leak can be stopped safely. P381 Eliminate all ignition sources if safe to do so. P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P311 Call a POISON CENTER or doctor/physician. P321 Specific treatment (see label).
Storage
P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. P410 Protect from sunlight.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Inhalation 8.6% of the mixture consists of ingredient(s) of unknown acute toxicity.
Other hazards which do not result in classification
Rapid release of compressed gas may cause frostbite. May displace oxygen and cause rapid suffocation.
