General Information
Revision date
2020-04-20
Product name
AutoClean
Product Synonyms
XENON DIFLUORIDE; XENON FLUORIDE (XeF2); XENON(II) FLUORIDE (F2Xe); F2Xe
CAS No.
13709-36-9
1.2.1 Relevant identified uses
semiconductor manufacture, general synthetic chemical
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
May intensify fire; oxidizer. May form combustible dust concentrations in air. Fatal if inhaled. Toxic if swallowed. Causes severe skin burns and eye damage. May cause respiratory irritation.
Prevention
Keep away from heat. Keep/Store away from clothing/combustible materials. Take any precaution to avoid mixing with combustibles. Do not breathe dust. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product. Wash thoroughly after handling.
Response
In case of fire: Use appropriate media for extinction. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
