General Information
Revision date
2021-01-21
Product name
4MS; 四甲基矽烷
Product Synonyms
TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749; TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749;C4H12Si
Chemical name
4MS; 四甲基矽烷
CAS No.
75-76-3
1.2.1 Relevant identified uses
semiconductor manufacture
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H224, H303, H333, H411
Hazard statements
Code
Statements
H224
Extremely flammable liquid and vapour
Section 2
SECTION 2: Hazards identification
Chemical Hazard(s) Classification: Flammable Liquids - Category 1 Acute Toxicity - Oral - Category 5 Acute Toxicity - Inhalation - Vapor - Category 5 Hazardous to the Aquatic Environment - Chronic - Category 2 Label content:
Signal word
Danger
Hazard statements
H224 Extremely flammable liquid and vapor. H303 May be harmful if swallowed. H333 May be harmful if inhaled. H411 Toxic to aquatic life with long lasting effects.
Prevention
P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P233 Keep container tightly closed. P240 Ground/Bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take precautionary measures against static discharge. P280 Wear protective gloves and eye/face protection. P273 Avoid release to the environment.
Response
P370+P378 In case of fire: Use appropriate media for extinction. P312 Call a POISON CENTER or doctor if you feel unwell. P304+P312 IF INHALED: Call a POISON CENTER or doctor/physician if you feel unwell. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P391 Collect spillage.
Storage
P403+P235 Store in a well-ventilated place. Keep cool.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
