General Information
Revision date
2021-01-15
Product name
4MS
Product Synonyms
TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749; TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749;C4H12Si
Chemical name
silanes
CAS No.
75-76-3
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
U.S. - 1-800-424-9300
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Extremely flammable liquid and vapor. Toxic to aquatic life with long lasting effects.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharges. Wear protective gloves and eye/face protection. Avoid release to the environment.
Response
In case of fire, use media appropriate for extinction. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Collect spillage.
Storage
Store in a well-ventilated place. Keep cool.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
